UV-LED photolithography exposure system

idonus proposes an innovative UV illumination system based on the use of high power LEDs and highgrade microlens arrays. This product finds applications in photoresist exposure and is suitable for a wide variety of substrates. The illumination quality ensures a high homogeneity of the critical dimensions and of the side wall angles over the full surface. Indeed our design provides perfectly stable illumination conditions, i.e. highly homogeneous intensity and low divergence angles over the whole surface, thanks to a fully telecentric optics.

LED BENEFITS

Recent progresses in LED technology have rendered UV-LEDs advantageous compared with traditional mercury-based lighting:

  • Long lifespan of LEDs, meaning no more consumable required
  • No daily calibration required, instantly stable illumination
  • Limited heating, implying reduced air cooling costs
  • Low power consumption
  • Light ON only during exposure (no shutter required)
  • No maintenance costs

Custom-made illumination system can be realized according to your needs. A system can be designed to replace mercury lamps for refurbishing of old equipment.

TYPICAL PERFORMANCES

Resolution 0.5 μm
Optical power 20 to 200 mW/cm2
Exposure area 50x50 to 300x300 mm2
Optical irradiance inhomogeneity ±3%
Maximum collimation angle ±1.5° to 3°
Wavelength 365 / 385 / 405 nm
Spectrum half width 12 nm
Peak power consumption 50 to 1500 W

Optical system

Light intensity picture (80x80mm2)

Front lens of the 300x300 UV
exposure system

EXAMPLE SYSTEM SPECIFICATIONS

At idonus, our engineering team will also develop products according to your needs. In-house machining and assembling facilities shorten the time from concept to finished product.

Different possible configurations of exposure systems are shown in the next table. Different wavelengths can be mixed to get a similar illumination as mercury lamps. A system can be designed according to your needs.

System type UV-EXP100S-
100mW
UV-EXP150S-
50mW
UV-EXP200S-
30mW
UV-EXP300S-
40mW
Optical power [mW/cm2] 100 50 30 40
Exposition area [mm2] 100x100 150x150 200x200 300x300
Optical irradiance
inhomogeneity [%]
±3 ±3 ±3 ±3
Max collimation angle [°] ±2.8° ±2° ±1.5° ±2.4°
Wavelength [nm]
(single or mixed)
365 (and/or
405/435)
365 (and/or
405/435)
365 (and/or
405/435)
365 (and/or
405/435)
Spectrum half width [nm] 12 12 12 12
System size [cm] 50x30x30 50x35x35 70x40x40 90x50x50
Peak power consumption [W] 450 450 450 1400

Normalized reversed enclosed intensity