VPE - Publications

Publications

COMBINED AL-PROTECTION AND HF-VAPOR RELEASE PROCESS FOR ULTRATHIN SINGLE CRYSTAL SILICON CANTILEVERS
S. Mouaziz; Microsystems Laboratory, Ecole Polytechnique Federale de Lausanne (EPFL), Lausanne, Switzerland

ETCH STOP MATERIALS FOR RELEASE BY VAPOR HF ETCHING
Thor Bakke; Fraunhofer IPMS, Dresden, Germany
16th MME Workshop 2005, Goeteborg, Sweden

QUASI-DRY RELEASE FOR MICRO ELECTRO-MECHANICAL SYSTEMS
M. Zickar; SAMLAB, Institute of Microtechnology (IMT), University of Neuchatel, Switzerland

A CLEAN WAFER-SCALE CHIP-RELEASE PROCESS WITHOUT DICING BASED ON VAPOR PHASE ETCHING
T. Overstolz; SAMLAB, Institute of Microtechnology (IMT), University of Neuchatel, Switzerland