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American Vacuum Society
Investigating the pattern transfer fidelity of Norland Optical Adhesive 81 for nanogrooves by microtransfer molding
Rahman Sabahi-Kaviani
Regina Luttge
J. Vac. Sci. Technol. B.2021.39:062810
aip.org
aip.org
iText 4.2.0 by 1T3XT2021-12-08T01:38:04-08:00
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