UV-EXP-LED Retrofit (UV-EXP-LE )
Extend the service life of your existing photolithography equipment with the idonus UV-EXP-LED Retrofit solution (UV-EXP-LE). Designed to replace conventional mercury-arc illumination in mask aligners and UV exposure tools, our high-power UV-EXP-LED light engine brings modern exposure performance to proven equipment while preserving its valuable alignment and mechanical functions.
The compact UV-EXP-LE light engine combines high-power UV-EXP-LEDs with optimized illumination optics to deliver intense, uniform and highly collimated UV light for reliable photolithography. Electronic switching eliminates lamp warm-up and the need for a mechanical shutter, while controlled irradiance and exposure dose help improve process repeatability.
Each retrofit is adapted to the original machine. Depending on the equipment, existing lenses, mirrors and mechanical components can be retained. The dedicated UV-EXP-CU control unit supports precise exposure control and can interface with the mask aligner's existing exposure trigger. Retrofit solutions have been demonstrated on equipment including Karl Suss MA6/BA6 and EVG 620 mask aligners.
Key benefits
- Extend equipment lifetime: upgrade the UV source while retaining a functional mask aligner.
- Mercury-free operation: eliminate mercury-arc lamps and their associated handling and disposal.
- Lower maintenance: UV-EXP-LED lifetime exceeding 10,000 hours of actual exposure time (indicative).
- Instant exposure: no lamp warm-up; electronic ON/OFF control without a mechanical shutter.
- Repeatable processing: controlled irradiance, exposure time and UV dose.
- Flexible integration: solutions tailored to the optical and mechanical design of existing equipment.
Technology and integration
UV-EXP-LED wavelengths of 365, 385, 395, 405 and 435 nm are available, including multi-wavelength configurations where appropriate. The UV-EXP-LE system can be configured with optimized homogenization optics and an irradiance sensor. The most suitable wavelength, illumination geometry and control interface are selected according to the photoresist process and the host equipment.
Retrofitting may be carried out by trained customer technicians with idonus documentation, at the idonus facility after removal of the light-source module, or on site by idonus technicians, depending on the machine and project scope.
Before and after retrofit
Upgrade your existing mask aligner without replacing the entire system. The original mercury-based illumination is replaced by an idonus UV-EXP-LED light engine, while suitable mechanical and optical components can be retained.
Before retrofit
Original mercury-based illumination
After retrofit
Modern mercury-free UV-EXP-LED illumination
Retrofit integration on a mask aligner
A practical example of upgrading an existing mask aligner while retaining its alignment stage and other functional components.
Before retrofit
Mask aligner with original mercury lamp
After retrofit
Mask aligner with integrated UV-EXP-LED light engine
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