UV-LED exposure systems for photolithography (UV-EXP series)
With the UV-EXP series, idonus offers an innovative UV illumination system based on the use of high-power LEDs and high-grade homogenization optics. This product line finds application in photoresist exposure (UV-LED photolithogaphy and curing) and is suitable for a wide variety of substrates and photoresists used in MEMS, microfluidics, photonics, semiconductors and photovoltaic applications. Our standard line of UV illumination products addresses photolithography needs for masks and wafers up to 300 mm wide (11.8 inches).
Customized solutions can be designed to suit your specific requirements (e.g., retrofitting of mask aligners, OEM for your future products). For further details on UV-LED retrofittings and custom exposure systems, see also our solutions > technologies page.